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Sorption pump : ウィキペディア英語版
Sorption pump
The sorption pump is a vacuum pump that creates a vacuum by adsorbing molecules on a very porous material like molecular sieve which is cooled by a cryogen, typically liquid nitrogen. The ultimate pressure is about 10−2 mbar. With special techniques this can be lowered till 10−7 mbar. The main advantages are the absence of oil or other contaminants, low cost and vibration free operation because there are no moving parts. The main disadvantages are that it cannot operate continuously and cannot effectively pump hydrogen, helium and neon, all gases with lower condensation temperature than liquid nitrogen. The main application is as a roughing pump for a sputter-ion pump in ultra-high vacuum experiments, for example in surface physics.
==Construction==
A sorption pump is usually constructed in stainless steel, aluminium or borosilicate glass. It can be a simple Pyrex flask filled with molecular sieve or an elaborate metal construction consisting of a metal flask containing perforated tubing and heat-conducting fins. A pressure relief valve can be installed. The design only influences the pumping speed and not the ultimate pressure that can be reached. The design details are a trade-off between fast cooling using heat conducting fins and high gas conductance using perforated tubing.
The typical molecular sieve used is a synthetic zeolite with a pore diameter around 0.4 nanometer ( Type 4A ) and a surface area of about 500 m2/g. The sorption pump contains between 300 g and 1.2 kg of molecular sieve. A 15-liter system will be pumped down to about 10−2 mbar by 300 g molecular sieve.〔''Modern Vacuum Practice'', Nigel S. Harris, 3rd ed. 2005, chapter 11.〕

抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
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